Field effect transistor device including an array of channel elements and methods for forming

ABSTRACT

The present invention relates to a semiconductor structure such as a field effect transistors (FETs) in which the channel region of each of the FETs is composed of an array of more than one electrically isolated channel. In accordance with the present invention, the distance between each of the channels present in the channel region is within a distance of no more than twice their width from each other. The FETs of the present invention are fabricated using methods in which self-assembled block copolymers are employed in forming the channel.

FIELD OF THE INVENTION

The present invention relates to semiconductor devices and methods offabricating the same. More particularly, the present invention relatesto field effect transistors (FETs) in which the channel region of eachof the FETs is composed of an array of more than one electricallyisolated channel. In accordance with the present invention, the distancebetween each neighboring channel is less than or equal to twice thewidth of an individual channel within the array. The FETs of the presentinvention are fabricated using methods in which self-assembled blockcopolymers are employed in forming the channel region.

BACKGROUND OF THE INVENTION

The dimensions of semiconductor field effect transistors (FETs) havebeen steadily shrinking over the last thirty 30 years or so, as scalingto smaller dimensions leads to continuing device performanceimprovements. Planar FET devices have a conducting gate electrodepositioned above a semiconducting channel, and electrically isolatedfrom the channel by a thin layer of gate dielectric. Applying voltage tothe conducting gate controls current through the channel.

For a given device length, the amount of current drive for an FET isdefined by the device width (w). Current drive scales proportionally todevice width, with wider devices carrying more current than narrowerdevice. This idea is illustrated schematically in FIGS. 1A-1C.Specifically, FIGS. 1A-1C are cross sectional views of planar FETsincluding a semiconductor substrate 10, a gate dielectric 12 and a gateconductor 14. As shown, the FET of FIG. 1A has a device width w, the FETof FIG. 1B has a device width of 2 w and the FET of FIG. 1C has a devicewidth of 3 w. In these devices, the width can be changed to anyarbitrary value, as it is defined lithographically. Different parts ofintegrated circuits (ICs) require FETs to drive different amounts ofcurrent, i.e., with different device widths, which is particularly easyto accommodate in planar FET devices by merely changing the device gatewidth (using lithography).

With conventional planar FET scaling reaching fundamental limits, thesemiconductor industry is looking at more unconventional devicegeometries, which will facilitate continued performance improvements.One such class of device geometries involves transforming thetransistor's semiconducting channel from a planar sheet into an array ofparallel channel elements. Single devices of this type have currentflowing through multiple channel elements in parallel.

Devices utilizing such channel arrays come in different flavors, and canbe summarized as follows:

-   -   (i) finFET: In a typical finFET structure, one of the channel        array elements is a semiconducting “fin” of width w and height        h, where typically w<h. The gate dielectric and gate conductor        are positioned around the fin such that current flows down the        channel on the two sides of the fin (generally, finFETs do not        use the fin top surface as part of the conducting channel).    -   (ii) tri-gate FET: In such a device, one of the channel array        elements has width w and height h, with w˜h, or w>h. The gate        dielectric and gate conductor are positioned around the channel        such that current flows down the channel on three sides.    -   (iii) nanowire FET: In this device, one of the channel array        elements has width w and height h roughly equal. That is, w˜h.        Typically, in a nanowire FET, the gate dielectric and gate        conductor are positioned around the channel such that current        flows down the channel on three sides. In other implementations,        the gate conductor and gate dielectric wrap all around the        nanowire elements such that current flows down the entire        nanowire perimeter. Nanowires are also often cylindrical rather        than the cubic shape shown in FIG. 2.

The channel array elements of the foregoing described devices are shown,for example, in FIG. 2, where reference numeral 16 denotes an insulatorsuch as an oxide, and reference numeral 18 denotes a semiconductor suchas, for example, Si, Ge, SiGe, GaAs, InAs, InP and other III/V or IIVIcompound semiconductors.

Adjusting the current drive of any of these channel array FETs is not asstraightforward as for the planar FET described above. One approach isto adjust the channel element (e.g., fin, tri-gate element, nanowires)dimensions for different devices, i.e., increasing h for some deviceswould increase their current drive relative to others. From afabrication standpoint however, this approach is difficult andimpractical.

Rather, current drive in these devices can be more easily adjusted usingthe scheme shown in FIGS. 3A-3C, where reference numeral 16 is aninsulator, reference numeral 18 is a semiconductor, reference numeral 12is a gate dielectric including, for example, SiO₂, SiON, SiN, metaloxides, or mixed metal oxides, and reference numeral 14 is a gateconductor including polysi, a conductive elemental metal, an alloyincluding at least one conductive elemental metal, or a nitride orsilicide of a conductive elemental metal. In these devices, currentdrive is increased by incrementally adding channel elements in parallel.

Specifically, the device shown in FIG. 3A is composed of one channelelement, while the device shown in FIG. 3B contains two channel elementsand the device shown in FIG. 3B contains three channel elements.Correspondingly, the device shown in FIG. 3C drives three times as muchcurrent (i.e., three times the device width) as the device shown in FIG.3A. In these FETs, the device width w is controlled by adding channeldiscrete elements in parallel. The three devices shown in FIGS. 3A-3Chave widths of 2 h, 4 h, and 6 h, respectively. Arbitrarily largecurrent drives can be achieved by adding channel elements to the device.

A main difficulty in fabricating any of these devices consisting ofmultiple channel elements (i.e., more than one fin, more than onenanowire, etc.) is in patterning and placement of the channel arrayelements. It is desirable that channel element widths (w) are small,i.e., in the range of 1-50 nm, which is below the limits of conventionallithographic techniques. Several specialized techniques can be used topattern at these dimensions (described below), however these invariablycome at a cost of being able to position the elements close to oneanother. In other words, it is extremely difficult to pattern smallchannel elements, which are also closely spaced. This combination isideally sought for practical implementation of these channel array FETdevices.

Generally speaking, formation of the channel array elements comprisingthese advanced FET designs requires patterning at sub-lithographicdimensions. While certainly there have been device demonstrations usingdifferent methods of high-resolution “research” types of lithography(such as electron-beam lithography), the discussion herein is limited tomethods which are considered manufacturable. That is, methods that havea high-throughput, and are cost effective.

One approach is illustrated schematically in FIGS. 4A-4E. FIG. 4A showsa cross sectional view of a photoresist line 20 which has been patternedon top of a thin semiconducting layer 18; the semiconductor layer 18lays atop an insulator 16. The photoresist 20 is “trimmed” in FIG. 4B byexposure to, for example, an O₂ plasma. This removes organic resist fromall sides (and top) exposed to the plasma, resulting in a linewidthreduction below the initially defined structure (shown in FIG. 4C). Theremaining photoresist pattern 20 is transferred into the underlyingsemiconductor layer 18 by, for example, reactive-ion etching (RIE) (FIG.4D), and finally the photoresist line 20 is removed (FIG. 4E).

This approach shown schematically in FIGS. 4A-4E works well for FETdevices composed of a single channel element, however difficulties arisewhen adopting the technique to pattern devices composed of more than oneelement.

FIGS. 5A-5C show another approach that can be used in forming such FETdevices. FIG. 5A shows the initial photoresist pattern for forming anFET of two channel array elements. In these drawing, elements 20, 18,and 16 are as described above in FIGS. 4A-4E. After the O₂ trim toreduce linewidths, which is shown in FIG. 5B, the remaining structureshave a large space between them (FIG. 5C). This is, of course, due tothe fact that the feature center-positions cannot change during the O₂trim. In an optimal device, these channel array elements would be packedas tightly as possible.

Another method for forming sub-lithographic FET channel elementsinvolves the use of what is known as “sidewall” processes, and isillustrated in FIGS. 6A-6D and 7A-7C. Initially, a line 26 in aconventional first hard mask material (e.g., silicon dioxide) is formedusing standard lithography and RIE on a stack containing semiconductor18 and insulator 16 (FIG. 6A). Conformal deposition of a second hardmask material 28 (e.g., silicon nitride) on top of this structureresults in the situation shown in FIG. 6B. An anisotropic etch of thissecond material 28 removes it from the semiconductor 18 as well as thetop of the patterned line 26, while leaving material on the sides (FIG.6C). Finally, the first hard mask material 26 can be selectively removedby, e.g., wet chemical etching, leaving only the free-standing sidewallmaterial 28 (FIG. 6D). The width of these sidewall features isdetermined by the deposition thickness of the second material. Sidewallprocesses are difficult in practice, however there have been severaldemonstrations of devices based on such processes.

Sidewall processes do not naturally lend themselves to form channelelements (the process shown in FIGS. 6A-6D forms two sidewalls), howeverthis difficulty can be sidestepped by careful consideration of theinitial line patterning step. The technique encounters greaterdifficulty when patterning devices formed of more than two channelelements, as shown in FIGS. 7A-7C. This structure shows twolithographically-defined lines 30 atop a stack including layers 18 and16 which result in 4 free-standing sidewalls 32 (FIG. 7C). As shown inFIGS. 7A-7C, sidewall processes also result in less-than-optimal devicepacking, and irregularly-spaced elements within a single device.

In view of the above, there is still a need for providing methods, whichform structures which have inherent advantages over all prior artmethods. That is, there is a need for providing channel array FETdevices where each channel element has a width that is equal to or lessthan 50 nm, preferably less than 20 nm, and each channel array iscomprised of elements where regular spacing between elements is equal toor less than 100 nm, preferably less than 40 nm.

SUMMARY OF THE INVENTION

Achieving improvements over the conventional means of forming thechannel array FETs described above requires better control over elementdimensions and efficient packing of device channel elements into arraysin which the spacing between each element is uniform and regular. Thepresent invention provides a method for achieving these improvements,which leads to the optimal device structure.

As mentioned above, previous demonstrations have used oxygen plasmatrimming or sidewall spacer processes to define the widths of FETchannel elements—these techniques have the inherent limitations onpacking density as previously described. The present invention providesa method of fabricating FET channel elements using a self-assemblyprocess, which sets the dimensions, density, and uniformity of theelements. For purposes of this application, the term “self-assembly”denotes the spontaneous organization of a material into a regularpattern. The characteristic dimensions of self-assembled films depend onfundamental length scales (such as molecular size), and are thereforeboth uniform and controllable.

There are several self-assembling systems that can result in regulararrays of channel elements. In the present invention, a system based ona diblock or triblock copolymer self-assembly is typically used. Undersuitable process conditions, the block copolymer molecules canmicrophase separate on a nanometer-scale length scale, forming arrays oflines and spaces in a thin polymer film. Many different block copolymerssuch as, for example, a block copolymer of polystyrene and poly(methylmethacrylate) can be used for this process.

Specifically, and in broad terms, the present invention provides anarticle comprising an array of elements having uniform and regularspacing between each of said elements that is equal to or less than 100nm, each element having a width that is equal to or less than 50 nm.

In one embodiment of the present invention the width of the elements isless than 20 nm and the spacing between the elements is less than 40 nm.

The present invention also provides a field effect transistor thatcomprises a source region and a drain region located in a semiconductormaterial; a channel region located between said source and drainregions; a gate dielectric located above said channel region; and a gateconductor located on said gate dielectric, wherein said channel regionis composed of an array of more than one electrically isolated channelhaving a space there between, said space between each neighboringchannel is located within a distance that is less than or equal to twicethe width of each channel of said array.

The present invention also provides a method of forming the abovementioned structures that include the use of a block copolymerself-assembly process. Specifically, and in one embodiment, the methodof the present invention includes the steps of: forming at least oneopening in a semiconductor substrate, said at least one opening defininga channel region for a semiconductor device; forming a block copolymerhaving the formula A-B or A-B-A, where A comprises a polymer of a monoalkenyl arene and B is a polymer of acrylic acid, methacrylic acid or anester thereof; selectively removing block B from within the at least oneopening, leaving block A as a patterned mask; and etching exposedportions of the semiconductor substrate within the at least one openingto provide said channel region having an array of more than oneelectrically isolated channel, with the space between each neighboringchannel being less than or equal to twice the width of an individualchannel of said array.

In one embodiment, the block copolymer may comprise an asymmetricdiblock copolymer that comprises about 60% or greater, preferably fromabout 60% to about 80 %, of block A, and about 40% or less, preferablyfrom about 20% to 40%, of B block. This embodiment provides a templatefor etching the device channel array in which each of the individualchannel array elements is defined by the matrix of cylindrical phasediblock copolymer pattern. In another embodiment, the block copolymermay comprise a symmetric diblock copolymer that comprises from about 40%to about 60%, preferably 50%, of block A, and from about 40% to about60%, preferably 50%, of block B. In this embodiment, the template fordefining the device channel array is provided in which each of theindividual channel array elements is defined by a lamellar (i.e.,sheet-like) polymer domain. In yet another embodiment, anotherasymmetric diblock copolymer is used in which block A is present in anamount of less than about 40%, preferably from about 20% to about 40%,and block B is present in an amount of greater than about 60%, with anamount from about 60% to about 80% being more preferred. In thisembodiment, the template for the device channel array is provided inwhich each of the individual array elements is defined by a cylindricalpolymer domain. The amounts of each of the blocks are based on weightpercent of the total copolymer (e.g., 100 wt. %).

In a preferred embodiment, block A of the block copolymer is comprisedof polystyrene (PS) and block B of the block copolymer is comprised of apoly(methyl methacrylate) (PMMA).

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1C are pictorial representations (through cross sectionalviews) of prior art planar FET devices having different device widths.Specifically, devices widths w, 2w and 3 w are shown in FIGS. 1A-1C,respectively.

FIG. 2 is a pictorial representation of three different channel elementsfor channel array FET devices. Specifically, finFET, tri-gate andnanowire elements are shown atop an insulator.

FIGS. 3A-3C are pictorial representations (through cross sectionalviews) showing various prior art FET devices formed using channelelements (either finFET, tri-gate or nanowire). In these drawings, thedevice width is controlled by adding discrete elements in parallel. InFIG. 3A, the width is 2 h, in FIG. 3B, the width is 4 h, and in FIG. 3C,the width is 6h.

FIGS. 4A-4E are pictorial representations (through cross sectionalviews) of a channel element that is prepared using a prior art O₂ plasmatrimming process.

FIGS. 5A-5C are pictorial representations (through cross sectionalviews) illustrating the formation of two FET channel elements using aprior art O₂ plasma trimming process.

FIGS. 6A-6D are pictorial representations (through cross sectionalviews) illustrating a structure including two FET channel elements thatare prepared using a prior art sidewall process.

FIGS. 7A-7C are pictorial representations (through cross sectionalviews) illustrating the formation of four FET channel elements using aprior art sidewall process.

FIG. 8A is a pictorial representation (through a cross sectional view)illustrating a semiconductor structure including the channel arrayregion of the present invention, FIG. 8B is a pictorial representation(through a cross sectional view) illustrating a FET device of thepresent invention which includes the channel region depicted in FIG. 8A;and FIG. 8C is a top down view of FIG. 8B.

FIGS. 9A-9B are pictorial representations (through cross sectionalviews) illustrating the formation of aligned polymer patterns using afirst embodiment of the block copolymer assembly process of the presentinvention.

FIGS. 10A-10B are pictorial representations (through cross sectionalviews) illustrating the formation of aligned polymer patterns using asecond embodiment of the block copolymer assembly process of the presentinvention.

FIGS. 11A-11B are pictorial representations (through cross sectionalviews) illustrating the formation of aligned polymer patterns using athird embodiment of the block copolymer assembly process of the presentinvention.

FIGS. 12A-12G are pictorial representations (through cross sectionalviews) illustrating the process flow for forming semiconductor nanowirearrays using one of the self-assembly processes of the presentinvention.

DETAILED DESCRIPTION OF THE INVENTION

The present invention, which provides an improved channel arraysemiconductor device and methods of fabricating the same, will now bedescribed in greater detail by referring to the following discussion aswell as drawings that accompany the present application. It is notedthat the drawings of the present application are provided forillustrative purposes and thus they are not drawn to scale.

Reference is first made to FIG. 8A which is a cross sectional view of astructure 100 that includes the inventive channel region of the presentinvention. Specifically, the structure 100 includes a semiconductorsubstrate 102 having a channel region 120 located at an upper surfacethereof. In accordance with the present invention, the channel region120 includes an array of more than one, preferably greater than two,electrically isolated channel 122 in which each neighboring channel 122within the array is located within a distance D₁ of less than or equalto twice the width w of an individual channel. The channel region 120 islocated within a portion of the semiconductor substrate 102 and itcomprises patterned semiconductor material remaining after performingone of the self-assembly methods of the present invention and etching.

The semiconductor substrate 102 may be comprised of a bulk semiconductormaterial including, for example, Si, Ge, SiGe, SiC, SiGeC, Ge, GaAs,GaN, InAs, InP and all other III/V or II/VI compound semiconductors.Semiconductor substrate 102 may also comprise an organic semiconductoror a layered semiconductor such as Si/SiGe, a silicon-on-insulator(SOI), a SiGe-on-insulator (SGOI) or germanium-on-insulator (GOI).Preferably, and as illustrated in the drawings, the semiconductorsubstrate 102 is a semiconductor-on-insulator substrate that includes abottom semiconductor layer 104 and a top semiconductor layer 108 thatare separated by a buried insulator 106. The buried insulator 106 maycomprise a crystalline or non-crystalline oxide or nitride, for example.In some embodiments of the present invention, it is preferred that thesemiconductor substrate 102 be composed of a Si-containing semiconductormaterial, i.e., a semiconductor material that includes silicon. Thesemiconductor substrate 102 may be doped, undoped or contain doped andundoped regions therein. The semiconductor substrate 102 may include asingle crystal orientation or it may include at least two coplanarsurface regions that have different crystal orientations (the lattersubstrate is referred to in the art as a hybrid substrate). When ahybrid substrate is employed, the nFET is typically formed on a (100)crystal surface, while the pFET is typically formed on a (110) crystalplane. The hybrid substrate can be formed by techniques that are wellknown in the art.

The semiconductor substrate 102 may also include a first doped (n- orp-) region, and a second doped (n- or p-) region. For clarity, the dopedregions are not specifically shown in the drawing of the presentapplication. The first doped region and the second doped region may bethe same, or they may have different conductivities and/or dopingconcentrations. These doped regions are known as “wells” and they areformed utilizing conventional ion implantation processes.

At least one isolation region (not shown) is then typically formed intothe semiconductor substrate 102. The isolation region may be a trenchisolation region or a field oxide isolation region. The trench isolationregion is formed utilizing a conventional trench isolation process wellknown to those skilled in the art. For example, lithography, etching andfilling of the trench with a trench dielectric may be used in formingthe trench isolation region. Optionally, a liner may be formed in thetrench prior to trench fill, a densification step may be performed afterthe trench fill and a planarization process may follow the trench fillas well. The field oxide may be formed utilizing a so-called localoxidation of silicon process. Note that the at least one isolationregion provides isolation between neighboring gate regions, typicallyrequired when the neighboring gates have opposite conductivities, i.e.,nFETs and pFETs. The neighboring gate regions can have the sameconductivity (i.e., both n- or p-type), or alternatively they can havedifferent conductivities (i.e., one n-type and the other p-type).

It is noted that the channel region 120 shown in FIG. 8A is fabricatedusing one of the methods to be described in greater detail herein below.FIGS. 12A-12G provide a schematic of such a process flow that can beused in the present invention. Details concerning the channel region 120are also provided herein below.

Following the formation of the structure 100 shown in FIG. 8A, aconventional CMOS process can be used in forming at least one FET thatincludes the inventive channel region 120. The resultant FET structurethat is formed after performing the conventional CMOS is shown in FIGS.8B and 8C. This FET structure includes a gate dielectric 124 located onexposed walls of each individual channel 122 and a gate conductor 126located on said substrate 102 and atop the channel region 120 that hasbeen lined with the gate dielectric 124. The gate dielectric 124 may bethe same thickness on all sides of the individual channel 122 (as shownin the figure), or it may have a different thickness on the top surfaceof the individual channel 122 relative to the sides of the individualchannel 122.

The gate dielectric 124 can be formed by a deposition process such as,for example, chemical vapor deposition (CVD), plasma-assisted CVD,metalorganic chemical vapor deposition (MOCVD), atomic layer deposition(ALD), evaporation, reactive sputtering, chemical solution depositionand other like deposition processes. Alternatively, the gate dielectric124 can be formed by a thermal process such as oxidation, nitridation oroxynitridation. The gate dielectric 124 may also be formed utilizing anycombination of the above processes.

The gate dielectric 124 is comprised of SiO₂, SiN, SiON, a high k metaloxide or a mixed metal oxide, or multilayers thereof. The term “high k”is used herein to denote an insulator having a dielectric constant ofgreater than about 4.0, preferably greater than 7.0. When the gatedielectric 124 is a high k gate dielectric, it typically comprises ametal oxide or a mixed metal oxide that may optionally include siliconor nitrogen. Some examples of high gate dielectrics that can be employedin the present invention include: HfO₂, HfSiO_(x), ZrO₂, ZrSiO_(x),Al₂O₃, TiO₂, La₂O₃, SrTiO₃, LaAlO₃, CeO₂, Y₂O₃ and multilayers thereof

The physical thickness of the gate dielectric 124 may vary, buttypically, the gate dielectric 24 has a thickness from about 0.5 toabout 10 nm, with a thickness from about 0.5 to about 3 nm being moretypical.

Next, the gate conductor 126 is formed over the structure, including thechannel region 120 that is lined with the gate dielectric 124, utilizinga conventional deposition process such as, for example, CVD,plasma-assisted CVD, MOCVD, atomic layer deposition (ALD), evaporation,reactive sputtering, chemical solution deposition, plating and otherlike deposition processes. The gate conductor 126 is comprised of anyconductive material including, for example, doped polysi, dopedamorphous Si, doped SiGe, an elemental metal, an alloy including atleast one elemental metal, an elemental nitride, an elemental silicideor multilayers thereof. Examples of metal gate conductors include, butare not limited to: TiN, TaSiN, TaN, W, Co, Ni, Cu, Cr, Mo and otherlike materials.

When amorphous Si, polySi or SiGe are used, the doping thereof may occurin-situ during the deposition process itself. Or alternatively, thesematerials may be first deposited and then subjected to a subsequent ionimplantation process that introduces either an n- or p-type dopantwithin a predetermined portion of the gate conductor.

Following the formation of the structure shown in FIG. 8B, the gateconductor 126 can be patterned by lithography and etching. Thelithographic step includes applying a photoresist to the gate conductor126, exposing the photoresist to a desired pattern of radiation anddeveloping the pattern using a conventional resist developer. Theetching step includes the use of at least one of a dry etching step(including reactive-ion etching (RIE), ion beam etching (IBE), plasmaetching or laser ablation), or a chemical wet etching process. Acombination of various etching techniques can also be used.

At least one spacer (not shown) is typically formed on exposed sidewallsof each of the patterned gate conductors that include channel region120. The at least one spacer is comprised of an insulator such as anoxide, nitride, oxynitride and/or any combination thereof. Preferably,the at least one spacer is comprised of SiN. The at least one spacer isformed by deposition and etching.

Source/drain diffusion regions 128 (see FIG. 8C) are then formed intothe substrate 102, for example the top semiconductor layer 108 of thesemiconductor-on-insulator substrate. The source/drain diffusion regionsare formed utilizing ion implantation and an annealing step. Theannealing step serves to activate the dopants that were implanted by theprevious implant step. The conditions for the ion implantation andannealing are well known to those skilled in the art. The source/draindiffusion regions may also include extension implant regions, which areformed prior to source/drain implantation using a conventional extensionimplant. The extension implant may be followed by an activation anneal,or alternatively the dopants implanted during the extension implant andthe source/drain implant can be activated using the same activationanneal cycle. Halo implants are also contemplated herein. It is notedthat doping of the Si-containing gate conductors can occur during theaforementioned implantations.

The above description in reference to FIGS. 8A-8C illustrates theformation of an FET structure that can include the channel region 120 ofthe present invention. It is noted that channel region 120 may also bereferred to herein as a region that includes channel array elements thathave a uniform size, e.g., width, as well as spacing between each of theindividual channel elements. Specifically, the channel region 120comprises an array of wires that are composed of semiconductor materialthat has been protected by block A after block B has been selectivelyremoved from that at least one opening.

In accordance with the present invention, the channel array elements,i.e., individual channels 122, have uniform and regular spacing betweeneach of the elements that is equal to or less than 100 nm and eachchannel element has a width that is equal to or less than 50 nm. Morespecifically, the channel array elements, i.e., individual channels 122,have uniform and regular spacing between each of the elements from about5 to about 50 nm and each channel element has a width from about 5 toabout 40 nm. It is noted that each neighboring channel 122 within thearray is located within a distance that is equal to or less than twicethe width of an individual channel of the array. The variation of thechannel element width is less than 25 percent of the average width, andthe variation of the regular spacing between channel elements in thearray is less than 25 percent of the mean spacing between channel arrayelements.

The channel elements of the present invention, i.e., semiconductorwires, are characterized as having a length from about 1 nm to less thanabout 1 micron. The channel elements of the present invention have awidth of about 1 nm to less than about 1 micron, preferably about 5 nmto about 30 nm. The channel elements of the present invention have anaspect ratio (i.e., height to width ratio) that is on the order of about0.25:1 or greater, preferably, from about 0.25:1 to about 1000:1.

The method of forming the inventive channel region 120 will now bedescribed in greater detail. Specifically, the channel region 120 isformed by first forming at least one opening in the semiconductorsubstrate 102. The at least one opening is used in the present inventionin defining the channel region 120 for the semiconductor device. The atleast one opening is formed by conventional lithography and etching. Thelithographic and etching steps used in forming the at least one openingmay include the same processing as described above for making a trenchisolation region.

Following the formation of the at least one opening, a block copolymerthat is capable of undergoing self-assembly is employed. Blockcopolymers employed in the present invention consist of amphiphiliccomponents which are attached by covalent bonding. Examples include, butare not limited to: linear diblock, triblock, and multiblock copolymers,star copolymers, and graft copolymers. In the present invention, diblockand triblock copolymers are typically used. Because of theincompatibility between the polymer molecules and connectivityconstraints, block copolymers spontaneously self-assemble intomicrophase-separated nanometer size domains that exhibit orderedmorphologies at equilibrium. In a given block copolymer system, therelative chain lengths of the blocks determine the resulting morphology.Commonly observed microdomain morphologies in bulk samples includeperiodic arrangements of lamellae, cylinders, and spheres. The sizes andperiods of these microdomain structures are governed by the chaindimensions and are typically on the order of 10 nm. Sub-10 nm structuresare also obtainable by choosing appropriate blocks with a highFlory-Huggins interaction parameter and decreasing the block lengths.Ordered structures can form in any block copolymer which has sufficientincompatibility between the blocks (determined by the degree ofpolymerization N, the Flory-Huggins interaction parameter, and thecopolymer architecture and block lengths).

The block copolymers employed in the present invention typically includeat least one first component, e.g., block A, that is left unaffected oris cross-linked by exposure to radiation and at least one secondcomponent, e.g., block B, that has a response to radiation. For example,if a second component of the block copolymer becomes degraded uponexposure to radiation (i.e., undergoes chain scission), while a firstcomponent of the block copolymer is left unaffected or is cross-linked,then the second component can be removed by this method, leaving behindthe first component, which maintains its original structure or pattern.Types of radiation, which can be used, include electromagnetic radiation(UV light/x-rays), electron beams, beams of nuclear particles, etc. Forexample, it is known that poly(methyl methacrylate) (PMMA) can bedegraded effectively by exposure to an electron beam or ultravioletlight, while polystyrene PS is much more stable. Thus, a self-assemblyprocess using diblock copolymers composed of polystyrene (PS) andpoly(methyl methacrylate) (PMMA) can be used in the present invention.

Other types of diblock copolymers that can be used in the presentinvention include, but are not limited to:polyethyleneoxide-polyisoprene, polyethyleneoxide-polybutadiene,polyethyleleoxide-polystyrene, polyetheleneoxide-polymethylmethacrylate,polystyrene-polyvinylpyridine, polystyrene-polyisoprene,polystyrene-polybutadiene, polybutadiene-polyvinylpyridine, andpolyisoprene-polymethylmethacrylate. The morphology of theself-assembled diblock copolymer thin film may be adjusted by varyingthe relative molecular weight ration of the two polymer blocks composingthe diblock copolymers. For ratios greater than about 80:20, the diblockcopolymer assembles into a spherical phase. For ratios between about60:40 and 80:20, the diblock copolymer assembles into a cylindricalphase. For ratios between about 50:50 and 60:40, the film takes on alamellar phase.

In addition to radiation, other methods may be used to effect changes inblock B (i.e., to remove block B while minimally affecting block A). Forexample, block B may be removed by ozone treatment, reactive ionetching, wet chemical or ion beam etching.

In one embodiment of the present invention, the block copolymer employedin the present invention has the formula A-B or A-B-A, where A is apolymer of a mono alkenyl arene and B is a polymer of acrylic ormethacrylic acid or an ester thereof. It is again noted that block B ofthe block copolymer is a polymer that can be readily removed from thecopolymer during a subsequent removal process.

Mono alkenyl arenes within the contemplation of the present inventionare vinyl aromatic monomers which include, for example, styrene,a-methylstyrene, p-methylstyrene, p-tert-butylstyrene,1,3-dimenthylstyrene, vinyl toluene, vinyl napthalenes and mixturesthereof. Of these vinyl aromatic compounds, styrene is most preferreddue to its easy availability and relatively low cost.

Block A of the copolymer used in the present invention typically has amolecular weight from about 10 to about 100 kg/mol, with a molecularweight from about 20 to about 50 kg/mol being more typical. When atriblock copolymer is used, each end block A may have the same ordifferent molecular weight. When the two end blocks A of the triblockcopolymer have different molecular weights, the molecular weights of thetwo end segments are within the range provided above. When polystyreneis used as block A, the polystyrene typically has a molecular weightfrom about 10 to about 100 kg/mol, with a molecular weight from about 20to about 50 kg/mol being more typical.

In the specific embodiment mentioned above, block B of the blockcopolymer is acrylic acid, methacrylic acid or an ester thereof.Examples of such polymers include acrylic acid, methacrylic acid, methylmethacrylate, ethyl acrylic acid, ethyl methacrylate, n-butylmethacrylic, isobutyl methacrylate, isodecyl methacrylate, laurylmethacrylate, stearyl methacrylate, and the like. Preferably, block B ofthe block copolymer is methyl methacrylate.

Block B of the block copolymer used in the present invention typicallyhas a molecular weight from about 5 to about 50 kg/mol, with a molecularweight from about 10 to about 30 kg/mol being more typical. Whenpoly(methyl methacrylate) (PPMA) is used as block B, the PMMA typicallyhas a molecular weight from about 5 to about 50 kg/mol, with a molecularweight from about 10 to about 30 kg/mol being more typical.

As indicated above, the block copolymer used in forming the channelregion 120 may comprise an asymmetric block copolymer or a symmetricblock copolymer. For a typical block copolymer employed in the presentinvention, the amount of block A is from about 20 to about 80 and theremainder is the B block. The amounts are based on the total weight ofthe copolymer and thus they are in terms of the specific block's weight

In one embodiment, the block copolymer may comprise an asymmetricdiblock copolymer that comprises about 60% or greater, preferably fromabout 60% to about 80%, of block A, and about 40% or less, preferablyfrom about 20% to 40%, of B block. This embodiment provides a templatefor etching the device channel array in which each of the individualchannel array elements is defined by the matrix of cylindrical phasediblock copolymer pattern. In another embodiment, the block copolymermay comprise a symmetric diblock copolymer that comprises from about 40%to about 60%, preferably 50%, of block A, and from about 40% to about60%, preferably 50%, of block B. In this embodiment, the template fordefining the device channel array is provided in which each of theindividual channel array elements is defined by a lamellar (i.e.,sheet-like) polymer domain. In yet another embodiment, anotherasymmetric diblock copolymer is used in which block A is present in anamount of less than about 40%, preferably from about 20% to about 40%,and block B is present in an amount of greater than about 60%, with anamount from about 60% to about 80% being more preferred. In thisembodiment, the template for the device channel array is provided inwhich each of the individual array elements is defined by a cylindricalpolymer domain. The amounts of each of the blocks are based on weightpercent of the total copolymer.

In a preferred embodiment, block A is comprised of polystyrene (PS) andblock B is comprised of a poly(methyl methacrylate) (PMMA).

The block copolymer is formed into the at least one opening utilizing aconventional deposition process such as, for example, spin-on coating,CVD, plasma-assisted CVD, evaporation, chemical solution deposition andother like techniques. It is noted that during the deposition of theblock copolymer within the at least one opening, some of the blockcopolymer is formed atop the surface of the semiconductor substrate 102.

Following the deposition of the block copolymer within the at least oneopening, the block copolymer may be subjected to conventional dryingsteps in which residual solvent is removed from the deposited film.During the drying step, or in a subsequent heating step, the heating ordrying temperature causes the individual polymers within the blockcopolymer to undergo a microphase separation. The microphase separationresults in the formation of line/space patterns within the film.

After the deposition and subsequent drying and/or heating, block B isselectively removed within the at least one opening to provide thepattern for forming the inventive channel region 120. In one embodimentof the present invention, the selective removal of block B can beperformed by exposing the deposited copolymer to radiation and thenimmersing the exposed block copolymer in a chemical solvent.Specifically, a UV exposure is performed by applying radiation having awavelength from about 170 to about 400 mn, preferably from about 190 toabout 300 nm, onto the deposited copolymer. The UV exposure may beperformed at a substrate temperature from about 10° to about 100° C. TheUV exposure may be performed using a continuous exposure or pulsedexposure. The UV exposure effects block B by, in this case,chain-scissioning the PMMA to make it soluble in a suitable solvent. Atthe same time, the UV exposure cross-links block A (polystyrene). It isnoted that the UV exposure is optional and is not required.

The chemical solvent that can be used in selectively removing block Bincludes any solvent in which block B is soluble and in which block A isinsoluble. For example, the chemical solvent used following the UVexposure step can include: acetic acid, isopropyl alcohol, or methyliso-butyl ketone.

In addition to UV exposure and immersing in a chemical solvent, theselective removal process of the block B from the matrix of thedeposited polymer can be performed by exposing the deposited polymer toozone. The ozone exposure is performed at a substrate temperature fromabout 10° to about 100° C. The ozone exposure includes the use of anyozone-containing source including, for example, air. [00751 Followingthe selective removal process, one or more etching steps such asreactive-ion etching, can be used to transfer the pattern provided byblock A into the underlying semiconductor substrate 102. During one ofthe later etching processing, the remaining block A of the blockcopolymer is removed from the structure.

The above discussion provides a broad description of the inventiveself-assembly method that can be used in the present invention informing the channel region. The following details three differentmethods for forming line/space array patterns using the diblockcopolymer self-assembly process mention above. Each of these methodsrelies upon a different type of composition of diblock copolymermaterial to form the pattern. Note that the reference numerals in theremaining drawings have the same meaning as defined above, unlessotherwise specified.

Method 1 (Embodiment 1): This method utilizes an asymmetric A-B diblockcopolymer in which block A is present as the majority component andblock B is present in lesser amounts than block A. In these examples,the polymer block B is one which can be preferentially removed from thefilm, e.g., by exposure to UV radiation and immersion in a chemicalsolvent, or by exposure to ozone. When a polymer of this composition isapplied to a surface containing a lithographically defined topography(FIG. 9A), a resulting line/space pattern forms in which half-cylindersof block B are embedded in a matrix of block A. The resulting patternself aligns with the preexisting topography. Removal of block B leavesthe lithographically-defined line subdivided into periods of theunderlying block A matrix. This is illustrated in FIG. 9B.

Method 2 (Embodiment 2): This method utilizes an asymmetric A-B diblockcopolymer in which block A is present as the minority component andblock B is present in a greater amount. In these examples, the polymerblock B is one which can be preferentially removed from the film, e.g.,by exposure to UV radiation and immersion in a chemical solvent, or byexposure to ozone. When a polymer of this composition is applied to asurface containing a lithographically defined topography (FIG. 10A), aresulting line/space pattern forms in which half-cylinders of block Aare embedded in a matrix of block B. The resulting pattern self alignswith the preexisting topography. Removal of block B leaves thelithographically-defined line subdivided into periods of the underlyingblock A matrix. This is illustrated in FIG. 10B.

Method 3 (Embodiment 3): Symmetric A-B diblock copolymer is used and isapplied within an opening as discussed above. In this example, blocks Aand B have substantially the same weight % in the total block copolymerand block B is a block which can be preferentially removed from thepolymer film, e.g., by exposure to UV radiation and immersion in achemical solvent, or by exposure to ozone. When a polymer of thiscomposition is applied to a surface containing a lithographicallydefined topography (FIG. 11A), a resulting line/space pattern forms inwhich lines/spaces of block A are embedded in a matrix of block B. Theresulting pattern self aligns with the preexisting topography. Removalof block B leaves the lithographically-defined line subdivided intoperiods of the underlying block A matrix. This is illustrated in FIG. 11B.

After the array pattern is formed in the diblock copolymer materialusing any of the three above-described methods, it can be used totemplate the patterning of underlying materials. One method by whichthis templating could take place is described herein, although there areother examples. It is noted that although detail methods for forming anarray of semiconducting wires is provided, the technique described abovecan similarly be used to form wire arrays of conducting materials (e.g.,metals) or wire arrays of insulating materials.

The process for forming arrays of silicon wires is shown schematicallyin FIGS. 12A-12G. The initial semiconductor substrate 102, shown in FIG.2A, is a semiconductor-on-insulator (SOI) substrate, in which a thin topsemiconductor layer 108 is separated from the semiconductor substrate104 by a buried insulator 106. Conventional lithography and etching areused to create a topographic pattern in the top semiconductor layer 108(see, FIG. 12B). Diblock copolymer self-assembly subdivides thistopographic pattern into smaller scale lines and spaces (FIGS. 12C and12D). In this example, the assembly method 1, described above is used.Reactive ion etching in oxygen removes polymer material from between thelines in the self-assembled pattern (see, FIG. 12E). Reactive ionetching of silicon removes silicon from everywhere not protected bypolymer, leaving only a line/space pattern remaining (e.g., FIG. 12F). Asecond reactive ion etch in oxygen removes any remaining polymer. (see,FIG. 12G).

While the present invention has been particularly shown and describedwith respect to preferred embodiments thereof, it will be understood bythose skilled in the art that the foregoing and other changes in formsand details may be made without departing from the spirit and scope ofthe present invention. It is therefore intended that the presentinvention not be limited to the exact forms and details described andillustrated, but fall within the scope of the appended claims.

1. An article comprising an array of elements having uniform and regularspacing between each of said elements that is equal to or less than 100nm, each element having a width that is equal to or less than 50 nm. 2.The article of claim 1 wherein said array of elements comprises wires ofsemiconductor material.
 3. The article of claim 2 wherein saidsemiconductor wires comprises Si.
 4. The article of claim 1 wherein eachof said elements has an aspect ratio of about 0.25:1 or greater.
 5. Thearticle of claim 1 wherein said uniform and regular spacing between eachof said elements is less than 40 nm and said width is less than 20 nm.6. The article of claim 1 wherein said array of elements aresemiconductor channels of a field effect transistor.
 7. The article ofclaim 1 wherein said array of elements comprise greater than 2 elements.8. The article of claim 1 wherein each element in said array has a widthvariation that is less than 25 percent of a mean width, and having aspacing variation of less than 25 percent of the mean spacing.
 9. Afield effect transistor (FET) comprising: a source region and a drainregion located in a semiconductor material; a channel region locatedbetween said source and drain regions; a gate dielectric located abovesaid channel region; and a gate conductor located on said gatedielectric, wherein said channel region is composed of an array of morethan one electrically isolated channel having a space there between,said space between each neighboring channel is located within a distancethat is less than or equal to twice the width of each channel of saidarray.
 10. The FET of claim 9 wherein said array of more than oneelectrically isolated channel comprises semiconductor wires.
 11. The FETof claim 10 wherein said semiconductor wires comprises Si wires.
 12. TheFET of claim 9 wherein said individual channel has a width that is equalto or less than 50 nm and said distance between neighboring channels isequal to or less than 100 nm.
 13. The FET of claim 12 wherein said widthis below 20 nm and said distance between neighboring channels is lessthan 40 nm.
 14. The FET of claim 9 wherein said array of channelscomprise greater than 2 channels.
 15. The FET of claim 9 wherein each ofsaid individual channels within said array has an aspect ratio of about0.25:1 or greater.
 16. A method of forming a semiconductor structurecomprising: forming at least one opening in a semiconductor substrate,said at least one opening defining a channel region for a semiconductordevice; forming a block copolymer having the formula A-B or A-B-A, whereA comprises a polymer of a mono alkenyl arene and B is a polymer ofacrylic acid, methacrylic acid or an ester thereof; selectively removingblock B from within the at least one opening, leaving block A as apatterned mask; and etching exposed portions of the semiconductorsubstrate within the at least one opening to provide said channel regionhaving an array of more than one electrically isolated channel having aspace there between, said space between each neighboring channel islocated within a distance that is less than or equal to twice the widthof each channel of said array.
 17. The method of claim 16 wherein saidforming said at least one opening comprises lithography and etching. 18.The method of claim 16 wherein said semiconductor substrate comprises asemiconductor-on-insulator.
 19. The method of claim 16 wherein formingsaid block copolymer comprises a deposition process.
 20. The method ofclaim 16 wherein A is polystyrene and B is poly(methyl methacrylate).21. The method of claim 16 wherein said block A has a molecular weightfrom about 10 to about 100 kg/mol, and said block B has a molecularweight from about 5 to about 50 kg/mol.
 22. The method of claim 16wherein said block A is present in an amount from about 20 to about 80%,and said block B is present in an amount from 80 to 20%.
 23. The methodof claim 16 wherein said block copolymer is an asymmetric diblockcomprising about 60% or greater of block A, and about 40% or less ofblock B.
 24. The method of claim 16 wherein said block copolymer is asymmetric diblock comprising from about 40 to about 60% block A, andfrom about 40 to about 60% block B.
 25. The method of claim 16 whereinsaid block copolymer is an asymmetric diblock comprising about 40% orless of block A, and about 60% or greater of block B.
 26. The method ofclaim 16 wherein said selectively removing comprises exposure to UVradiation and immersing in a chemical solvent.
 27. The method of claim16 wherein said selectively removing comprises exposure to ozone. 28.The method of claim 16 wherein said etching comprises reactive ionetching.
 29. A method of forming a semiconductor structure comprising:forming at least one opening in a semiconductor substrate, said at leastone opening defining a channel region for a semiconductor device;forming a block copolymer having at least one A block and at least one Bblock, wherein said at least one A block comprises a polymer that is notaffected or cross-linked upon subjecting said block copolymer to atreatment step, while said at least one B block comprising a polymerthat is affected or cross-linked upon subjecting said block copolymer tosaid treatment step; selectively removing block B from within the atleast one opening, leaving block A as a patterned mask; and etchingexposed portions of the semiconductor substrate within the at least oneopening to provide said channel region having an array of more than oneelectrically isolated channel having a space there between, said spacebetween each neighboring channel is located within a distance that isless than or equal to twice the width of each channel of said array. 30.The method of claim 29 wherein said block copolymer comprisespolyethyleneoxide-polyisoprene, polyethyleneoxide-polybutadiene,polyethyleleoxide-polystyrene, polyetheleneoxide-polymethylmethacrylate,polystyrene-polyvinylpyridine, polystyrene-polyisoprene,polystyrene-polybutadiene, polybutadiene-polyvinylpyridine,polyisoprene-polymethylmethacrylate, orpolystyrene-polymethylmethacrylate.